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SU-8 is a thick, near-UV photoresist used for MEMS fabrication. This forum is for discussing SU-8 research, development, applications, suppliers, coating, processing, removal, economics, benefits, drawbacks, and other issues related to SU-8.

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1. Question:Suppliers of SU-8? by Brian, 2001, Oct 04
2. Feedback:Tech Support by Kev, 2001, Oct 10
4. News:SU-8 Providers by SU8man, 2006, May 10
3. Note:SU-8 information resource. by Brian, 2001, Oct 05
1. Untitled by Wenge Zhang, 2001, Oct 05
5. Question:where can i find su-8 sold in China? by wujin, 2004, Apr 27
5. More:SU8 website changed address! by aveclafaux, 2006, Aug 25
4. Question:SU-8 as a master for hot embossing by Emer, 2001, Oct 18
1. Feedback:SU-8 Microembossing by Richard Gray, 2001, Nov 08
5. Question:Utilisation of Su-8 for optical components by Yves, 2001, Nov 02
6. Question:i-line filters for elimination of 'T-topping' problem? by Novak Farrington, 2001, Dec 03
2. Idea:T-topping and PEB, 2005, Jul 06
7. SU-8 seems to be a good thermal insulator by Bing, 2001, Dec 17
8. Question:Research Assistant by sarang, 2002, Jan 24
1. Note:Hai sarang by rpshk@yahoo.com, 2005, Aug 01
9. Question:adhesion SU-8 by oliver, 2002, Jan 30
1. News:SU-8 Adhesion by MarkShaw, 2002, Feb 04
10. SU8 -Removal by sarang, 2002, Feb 12
1. Feedback:Untitled by Sarah, 2002, Feb 24
2. News:SU8-Removal by Tepla, 2002, May 06
1. Question:More details on the Tepla approach, please. by Brian, 2002, May 06
1. Feedback:TePla Work to Date. More information is available. by Hank Gilbert, 2003, Mar 26
2. Warning:SU8 - TePla America, Inc. by Karsten Mausolf, 2002, Oct 04
3. Question:Message for Sarang by Chinmay, 2004, Jan 09
5. SU-8 removal by Satyanarayan, 2007, Apr 03
6. Idea:removing su8 by LuisEnrique, Feb 11, 11:44
11. Question:SU-8 compatibility with DMSO by Desmo, 2002, Jun 07
1. Question:SU8 Bonding Problem by sarang, 2002, Jul 15
12. Question:SU-8 uniformity problem after coating by holiday_2001sg@yahoo.com.sg, 2002, Oct 01
13. Note:SU-8 as e-beam resist by Tiberiu, 2002, Oct 09
14. Question:Crosslinked SU8 removal by kssgin@yahoo.com, 2002, Dec 17
2. Question:skew surface and bur edge by wzhang@uci.edu, 2003, Dec 20
16. Question:SU-8 biocompatibility and medical applications by Yoel, 2002, Dec 18
3. not really by Shmuel, 2006, Mar 11
17. Su8 thickness uniformity across the wafer by Fran Blanco, 2003, Feb 17
18. Question:SU8 and fluorescence by Patrick Abgrall, 2003, Mar 11
1. About Su8 and Fluorescence by Fran, 2003, Mar 20
2. Research Associate by Eric Hullander, 2005, Sep 26
19. Question:Flatness of SU8 during Softbake by wei_lim, 2003, Mar 20
1. Ok:Untitled, 2003, Mar 20
20. Question:Bonding with SU8 by J, 2003, May 09
1. Research Associate by Eric Hullander, 2005, Sep 26
21. SU-8 biocompatibility by research student, 2003, Jun 13
22. Question:Untitled by huinanliang, 2003, Jun 17
1. Question:su8 bonding problem by huinanliang, 2003, Jun 17
23. Untitled by dte002, 2003, Jul 05
24. SU8 bonding with SU8 by Calvin, 2003, Sep 08
25. Question:Applying SU8 to Thermoplastics by colin, 2003, Sep 29
26. Question:Planarization of SU8 using CMP by Peter Blennow, 2003, Nov 14
27. Question:Thin film deposition onto SU-8 - adhesion problems by michael, 2003, Dec 27
28. Question:want sharper corners by rollcasterschek, 2004, Jan 14
1. Question:Reg: want sharper corners by kapes, 2004, Jun 09
29. Idea:SU-8 bonded to nanofibers by george, 2004, Mar 10
30. Question:Thickness Control by Weed, 2004, Mar 11
1. Leveled hotplate? by Rainod, 2004, Mar 31
(_ Agree:Hotplate leveling is important. by Brian, 2004, Jun 22
31. Question:An appeal for help from a beginner (but a happy one) by Jim, 2004, May 04
32. More:we are keen to know about products of Sotec and equivalent to SU8 by rpsoni, 2004, May 07
33. Question:SU-8 adhesion to glass substrate by Annuar, 2004, Jun 10
1. Glass / SU-8 adhesion by Jim, 2004, Jul 01
34. Question:SU8 density ? by Nico, 2004, Jun 16
35. Question:Taper SU-8 structure by Annuar, 2004, Jun 20
1. Tapered SU-8 structures by Brian, 2004, Jun 22
3. Untitled by Ryan Turner, 2004, Jul 08
36. Question:SU-8 development problems by leonid, 2004, Jun 28
37. Multi-layered SU-8 (optimised?) by Jim, 2004, Jul 06
38. Question:Behaviour of SU-8 at high temperatures by Sandeep, 2004, Jul 08
39. Untitled by siriponsukuabol, 2004, Aug 13
40. Question:conductive SU8 by johan feenstra, 2004, Aug 20
1. Conductive and magnetic SU8 by Thorsten, 2005, Mar 12
42. Question:Adhesion force by Mike, 2004, Sep 07
43. Question:Unwanted tapering of SU-8 structure by sus, 2004, Sep 08
3. Question:swelling of SU-8 in electroforming solution by zzliedu, 2006, Jun 27
44. Question:Width Control by Gene, 2004, Sep 15
45. Pyramid structure by e-beam lithography by yangx349@umn.edu, 2004, Sep 16
1. Untitled by Michelle, 2005, Sep 09
46. Question:Problems with the alignment by Leire, 2004, Sep 28
47. Question:Bad profile of SU-8-2050 by sklee, 2004, Oct 06
50. Question:SU-8 on sacrificial wafer by Steve, 2004, Oct 19
51. News:SU-8 Stripping with MW plasma by Karsten Mausolf, Senior Process Engineer, 2004, Oct 25
52. Question:Minimum Feature Size by Bhargav, 2004, Nov 12
53. Question:Swelling of the SU-8 during exposure by Carson, 2004, Dec 02
54. Question:Su-8 adhesion to Si wafers.... by Neal, 2004, Dec 07
1. a couple of tips by sandra wilson, 2005, Jun 27
5. Feedback:Untitled by Satyanarayan, 2007, May 22
55. Question:SU-8 for planarization by Arvin, 2004, Dec 16
56. Question:strange problem while working with SU-8 50 by Amit Asthana, 2005, Apr 13
2. Question:over exposed? by Tim, 2005, Dec 14
3. Untitled, 2006, Feb 06
57. Question:Water permeability by Chung-Yen Chao, 2005, May 25
59. Question:su 8 and high vacuum by david, 2005, Jul 07
60. Question:protection of the SU 8 , 2005, Jul 13
1. re-"protection of the SU 8" by SU8man, 2005, Jul 13
(_ Untitled, 2005, Jul 26
(_ Untitled by SU8man, 2005, Aug 18
(_ Feedback:Untitled, 2006, May 09
61. Cleaning Microfluidic Devices (SU8-2000 on Glass) by Avinash Kane, 2005, Jul 14
1. Untitled by SU8man, 2005, Aug 18
62. Question:Obsorbtion coefficient of SU 8 Blends.. by Riyaz Pasha Shaik, 2005, Aug 01
1. Untitled by SU8man, 2005, Aug 18
2. Untitled by sr, 2005, Aug 25
3. Feedback:Thanks by Riyaz, 2005, Aug 29
63. Question:SU 8 Reflow? by Shaik, Riyaz Pasha, 2005, Sep 16
64. Question:Dicing through SU-8 by Jason, 2005, Oct 11
65. Question:Thinning SU-8 2002 by Mark, 2005, Oct 31
68. Question:Alignment Question for 2-step photolithography using SU-8 by Razim, 2006, Feb 23
1. Idea:Aligning, 2006, Mar 14
2. Ok:Thanks! by razim, 2006, Mar 15
70. Question:SU8 stiction problem by praba.selva@gmail.com, 2006, Apr 05
1. Feedback:Untitled by PJ, 2006, Apr 20
71. Question:SU8 photo resist with filler particles by Benjamin, 2006, Apr 24
2. filler SU-8 by SU8man, 2007, Apr 25
72. Question:Thicker SU 8 spin problems by Pedro, 2006, May 03
73. Question:SU-8 problems by Kelkar, 2006, May 23
1. Satya by Satyanarayan, 2007, Apr 03
74. Question:Fabs or foundries that can do double layer SU8? by Wouter Meuleman, 2006, Jun 07
75. Question:mold release layer for SU-8 by Abang Annuar, 2006, Jun 26
76. Mechanical Engineer by Matthew Shiu, 2006, Aug 08
78. professional winnings best casino directories, best casino: Up to $500 Welcome Bonus , best casino Success by bemedia20, 2006, Sep 07
79. Question:Using SU-8 with S1813 by EdCarr101, 2006, Nov 27
80. Question:Thickness problem and divots after SU-8 spin coating by simalibre, 2006, Dec 13
1. Idea:Eliminando burbujas en la pelicula de SU8 by LuisEnrique, Feb 11, 11:33
81. Question:Undeveloped SU-8 light sensitivity - ok for use under 'normal' lighting? by kh, 2007, Jan 03
82. News:Thick Photoresist/Litho Career Opportunity in Los Angeles by nickm@wdsearch.com, 2007, Feb 20
83. News:Revised Los Angeles Photolithography Process Engineer Search by nickm@wdsearch.com, 2007, Feb 21
84. Question:Conductive or Colored SU-8 by dalnim, 2007, Apr 08
1. Untitled by SU8man, 2007, Apr 25
85. Question:Thin layers by fsteve, 2007, May 11
86. Question:Untitled by tigon327, 2007, May 20
1. SU-8 Solvent by Neios, 2007, Oct 15
87. Image Reversal? by Yitram, 2007, Jun 12
88. SU-8 thickness by tresvpl, 2007, Jun 19
89. Question:PMMA/COC vs. Su8 Compatibility by iman, 2007, Sep 10
90. memsconcepts.com by sharone, 2007, Oct 29
91. Question:Photomask Cleaning by terrymcb, 2007, Nov 02
92. Question:SU-8 removal by Solmaz, Mar 12, 11:00

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