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SU-8 is a thick, near-UV photoresist used for MEMS fabrication. This forum is for discussing SU-8 research, development, applications, suppliers, coating, processing, removal, economics, benefits, drawbacks, and other issues related to SU-8.
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- 1. Question:Suppliers of SU-8? by Brian, 2001, Oct 04
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- 2. Feedback:Tech Support by Kev, 2001, Oct 10
- 4. News:SU-8 Providers by SU8man, 2006, May 10
- 3. Note:SU-8 information resource. by Brian, 2001, Oct 05
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- 1. Untitled by Wenge Zhang, 2001, Oct 05
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- 5. Question:where can i find su-8 sold in China? by wujin, 2004, Apr 27
- 5. More:SU8 website changed address! by aveclafaux, 2006, Aug 25
- 4. Question:SU-8 as a master for hot embossing by Emer, 2001, Oct 18
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- 1. Feedback:SU-8 Microembossing by Richard Gray, 2001, Nov 08
- 5. Question:Utilisation of Su-8 for optical components by Yves, 2001, Nov 02
- 6. Question:i-line filters for elimination of 'T-topping' problem? by Novak Farrington, 2001, Dec 03
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- 2. Idea:T-topping and PEB, 2005, Jul 06
- 7. SU-8 seems to be a good thermal insulator by Bing, 2001, Dec 17
- 8. Question:Research Assistant by sarang, 2002, Jan 24
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- 1. Note:Hai sarang by rpshk@yahoo.com, 2005, Aug 01
- 9. Question:adhesion SU-8 by oliver, 2002, Jan 30
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- 1. News:SU-8 Adhesion by MarkShaw, 2002, Feb 04
- 10. SU8 -Removal by sarang, 2002, Feb 12
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- 1. Feedback:Untitled by Sarah, 2002, Feb 24
- 2. News:SU8-Removal by Tepla, 2002, May 06
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- 1. Question:More details on the Tepla approach, please. by Brian, 2002, May 06
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- 1. Feedback:TePla Work to Date. More information is available. by Hank Gilbert, 2003, Mar 26
- 2. Warning:SU8 - TePla America, Inc. by Karsten Mausolf, 2002, Oct 04
- 3. Question:Message for Sarang by Chinmay, 2004, Jan 09
- 5. SU-8 removal by Satyanarayan, 2007, Apr 03
- 6. Idea:removing su8 by LuisEnrique, Feb 11, 11:44
- 11. Question:SU-8 compatibility with DMSO by Desmo, 2002, Jun 07
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- 1. Question:SU8 Bonding Problem by sarang, 2002, Jul 15
- 12. Question:SU-8 uniformity problem after coating by holiday_2001sg@yahoo.com.sg, 2002, Oct 01
- 13. Note:SU-8 as e-beam resist by Tiberiu, 2002, Oct 09
- 14. Question:Crosslinked SU8 removal by kssgin@yahoo.com, 2002, Dec 17
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- 2. Question:skew surface and bur edge by wzhang@uci.edu, 2003, Dec 20
- 16. Question:SU-8 biocompatibility and medical applications by Yoel, 2002, Dec 18
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- 3. not really by Shmuel, 2006, Mar 11
- 17. Su8 thickness uniformity across the wafer by Fran Blanco, 2003, Feb 17
- 18. Question:SU8 and fluorescence by Patrick Abgrall, 2003, Mar 11
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- 1. About Su8 and Fluorescence by Fran, 2003, Mar 20
- 2. Research Associate by Eric Hullander, 2005, Sep 26
- 19. Question:Flatness of SU8 during Softbake by wei_lim, 2003, Mar 20
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- 1. Ok:Untitled, 2003, Mar 20
- 20. Question:Bonding with SU8 by J, 2003, May 09
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- 1. Research Associate by Eric Hullander, 2005, Sep 26
- 21. SU-8 biocompatibility by research student, 2003, Jun 13
- 22. Question:Untitled by huinanliang, 2003, Jun 17
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- 1. Question:su8 bonding problem by huinanliang, 2003, Jun 17
- 23. Untitled by dte002, 2003, Jul 05
- 24. SU8 bonding with SU8 by Calvin, 2003, Sep 08
- 25. Question:Applying SU8 to Thermoplastics by colin, 2003, Sep 29
- 26. Question:Planarization of SU8 using CMP by Peter Blennow, 2003, Nov 14
- 27. Question:Thin film deposition onto SU-8 - adhesion problems by michael, 2003, Dec 27
- 28. Question:want sharper corners by rollcasterschek, 2004, Jan 14
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- 1. Question:Reg: want sharper corners by kapes, 2004, Jun 09
- 29. Idea:SU-8 bonded to nanofibers by george, 2004, Mar 10
- 30. Question:Thickness Control by Weed, 2004, Mar 11
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- 1. Leveled hotplate? by Rainod, 2004, Mar 31
- (_ Agree:Hotplate leveling is important. by Brian, 2004, Jun 22
- 31. Question:An appeal for help from a beginner (but a happy one) by Jim, 2004, May 04
- 32. More:we are keen to know about products of Sotec and equivalent to SU8 by rpsoni, 2004, May 07
- 33. Question:SU-8 adhesion to glass substrate by Annuar, 2004, Jun 10
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- 1. Glass / SU-8 adhesion by Jim, 2004, Jul 01
- 34. Question:SU8 density ? by Nico, 2004, Jun 16
- 35. Question:Taper SU-8 structure by Annuar, 2004, Jun 20
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- 1. Tapered SU-8 structures by Brian, 2004, Jun 22
- 3. Untitled by Ryan Turner, 2004, Jul 08
- 36. Question:SU-8 development problems by leonid, 2004, Jun 28
- 37. Multi-layered SU-8 (optimised?) by Jim, 2004, Jul 06
- 38. Question:Behaviour of SU-8 at high temperatures by Sandeep, 2004, Jul 08
- 39. Untitled by siriponsukuabol, 2004, Aug 13
- 40. Question:conductive SU8 by johan feenstra, 2004, Aug 20
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- 1. Conductive and magnetic SU8 by Thorsten, 2005, Mar 12
- 42. Question:Adhesion force by Mike, 2004, Sep 07
- 43. Question:Unwanted tapering of SU-8 structure by sus, 2004, Sep 08
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- 3. Question:swelling of SU-8 in electroforming solution by zzliedu, 2006, Jun 27
- 44. Question:Width Control by Gene, 2004, Sep 15
- 45. Pyramid structure by e-beam lithography by yangx349@umn.edu, 2004, Sep 16
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- 1. Untitled by Michelle, 2005, Sep 09
- 46. Question:Problems with the alignment by Leire, 2004, Sep 28
- 47. Question:Bad profile of SU-8-2050 by sklee, 2004, Oct 06
- 50. Question:SU-8 on sacrificial wafer by Steve, 2004, Oct 19
- 51. News:SU-8 Stripping with MW plasma by Karsten Mausolf, Senior Process Engineer, 2004, Oct 25
- 52. Question:Minimum Feature Size by Bhargav, 2004, Nov 12
- 53. Question:Swelling of the SU-8 during exposure by Carson, 2004, Dec 02
- 54. Question:Su-8 adhesion to Si wafers.... by Neal, 2004, Dec 07
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- 1. a couple of tips by sandra wilson, 2005, Jun 27
- 5. Feedback:Untitled by Satyanarayan, 2007, May 22
- 55. Question:SU-8 for planarization by Arvin, 2004, Dec 16
- 56. Question:strange problem while working with SU-8 50 by Amit Asthana, 2005, Apr 13
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- 2. Question:over exposed? by Tim, 2005, Dec 14
- 3. Untitled, 2006, Feb 06
- 57. Question:Water permeability by Chung-Yen Chao, 2005, May 25
- 59. Question:su 8 and high vacuum by david, 2005, Jul 07
- 60. Question:protection of the SU 8 , 2005, Jul 13
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- 1. re-"protection of the SU 8" by SU8man, 2005, Jul 13
- (_ Untitled, 2005, Jul 26
- (_ Untitled by SU8man, 2005, Aug 18
- (_ Feedback:Untitled, 2006, May 09
- 61. Cleaning Microfluidic Devices (SU8-2000 on Glass) by Avinash Kane, 2005, Jul 14
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- 1. Untitled by SU8man, 2005, Aug 18
- 62. Question:Obsorbtion coefficient of SU 8 Blends.. by Riyaz Pasha Shaik, 2005, Aug 01
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- 1. Untitled by SU8man, 2005, Aug 18
- 2. Untitled by sr, 2005, Aug 25
- 3. Feedback:Thanks by Riyaz, 2005, Aug 29
- 63. Question:SU 8 Reflow? by Shaik, Riyaz Pasha, 2005, Sep 16
- 64. Question:Dicing through SU-8 by Jason, 2005, Oct 11
- 65. Question:Thinning SU-8 2002 by Mark, 2005, Oct 31
- 68. Question:Alignment Question for 2-step photolithography using SU-8 by Razim, 2006, Feb 23
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- 1. Idea:Aligning, 2006, Mar 14
- 2. Ok:Thanks! by razim, 2006, Mar 15
- 70. Question:SU8 stiction problem by praba.selva@gmail.com, 2006, Apr 05
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- 1. Feedback:Untitled by PJ, 2006, Apr 20
- 71. Question:SU8 photo resist with filler particles by Benjamin, 2006, Apr 24
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- 2. filler SU-8 by SU8man, 2007, Apr 25
- 72. Question:Thicker SU 8 spin problems by Pedro, 2006, May 03
- 73. Question:SU-8 problems by Kelkar, 2006, May 23
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- 1. Satya by Satyanarayan, 2007, Apr 03
- 74. Question:Fabs or foundries that can do double layer SU8? by Wouter Meuleman, 2006, Jun 07
- 75. Question:mold release layer for SU-8 by Abang Annuar, 2006, Jun 26
- 76. Mechanical Engineer by Matthew Shiu, 2006, Aug 08
- 78. professional winnings best casino directories, best casino: Up to $500 Welcome Bonus , best casino Success by bemedia20, 2006, Sep 07
- 79. Question:Using SU-8 with S1813 by EdCarr101, 2006, Nov 27
- 80. Question:Thickness problem and divots after SU-8 spin coating by simalibre, 2006, Dec 13
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- 1. Idea:Eliminando burbujas en la pelicula de SU8 by LuisEnrique, Feb 11, 11:33
- 81. Question:Undeveloped SU-8 light sensitivity - ok for use under 'normal' lighting? by kh, 2007, Jan 03
- 82. News:Thick Photoresist/Litho Career Opportunity in Los Angeles by nickm@wdsearch.com, 2007, Feb 20
- 83. News:Revised Los Angeles Photolithography Process Engineer Search by nickm@wdsearch.com, 2007, Feb 21
- 84. Question:Conductive or Colored SU-8 by dalnim, 2007, Apr 08
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- 1. Untitled by SU8man, 2007, Apr 25
- 85. Question:Thin layers by fsteve, 2007, May 11
- 86. Question:Untitled by tigon327, 2007, May 20
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- 1. SU-8 Solvent by Neios, 2007, Oct 15
- 87. Image Reversal? by Yitram, 2007, Jun 12
- 88. SU-8 thickness by tresvpl, 2007, Jun 19
- 89. Question:PMMA/COC vs. Su8 Compatibility by iman, 2007, Sep 10
- 90. memsconcepts.com by sharone, 2007, Oct 29
- 91. Question:Photomask Cleaning by terrymcb, 2007, Nov 02
- 92. Question:SU-8 removal by Solmaz, Mar 12, 11:00
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