I got problem in uniformity of layer after the coating.
The liquid will form shell after the dispensing, therefore it
acts as a barrier. This will result in non uniform layer with
thick region around the outer boundary of the shell.
Is there anyone know how to solve this problem? Actually I
have tried to leave it for 1-2 hours before Soft Bake, at
room temperature and also at 50 degrees C.
Thanks.
Best Regards.
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