Question: Bonding with SU8 

Forum: SU-8 Photoresist Discussion Forum
Date: 2003, May 09
From: J <jmruano@ikerlan.es>

Hi there, I was wondering if any of you have been working on bonding of SU8 layers against different substrates (pyrex, silicon, anothe SU8 wafer...). There is few concise literature about that, force, temperature, pressure, state of the SU8. I need some data to start with. I am planning to make some test in a Substrate bonder. I hope that any of you have any idea about that. Kind regards J

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1. Research Associate by Eric Hullander, 2005, Sep 26

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