Question: Planarization of SU8 using CMP 

Forum: SU-8 Photoresist Discussion Forum
Date: 2003, Nov 14
From: Peter Blennow <pebletu@hotmail.com>

Hi everyone, Does anyone have any experience or suggestions on how to planarize a thin film of SU8? I am working in a project where we try to planarize and decrease the height of a cured SU8 film. The initial thickness is about 0.005 mm. The final thickness should be 0.003 mm. I would be grateful for any suggestions. /Peter Blennow

[ Next-in-Thread ]  [ Next Message ] 

Messages Inline: [ 1 ]  [ All ]  Outline: [ 1 ]  [ 2 ]  [ 3 ] 

[ Add Message ]  to: "Planarization of SU8 using CMP"

[ Register ]  [ Subscribe ]  [ Admin Mode ] 
[ Show Frames ]  [ Search ]  [ Help for Discussion Forum 1.10EW ]