Question: Thin film deposition onto SU-8 - adhesion problems 

Forum: SU-8 Photoresist Discussion Forum
Date: 2003, Dec 27
From: michael <l_473@hotmail.com>

Please could anyone provide any hints/advice on improving the adhesion between an SU-8 substrate layer and sputtered metal films. Which metals adhere best? What surface preparation can be carried out prior to metal deposition - e.g. sputter clean / plasma clean? Any suggestions would be greatly appreciated. Many thanks, Michael

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