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Question: want sharper corners
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SU-8 Photoresist Discussion Forum
Date: 2004, Jan 14
From: rollcasterschek
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I have been working with SU-8 2005. I am getting generally good results, however, the corners of my features do not clear out. I am working on glass wafers and my features are enclosures or depressions in the cross linked resist. It is vital that the corners be sharp and currently they are somewhat rounded. The material is left behind right at the glass surface.
Thanks
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- 1. Question:Reg: want sharper corners by kapes, 2004, Jun 09
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