Question: SU-8 adhesion to glass substrate 

Forum: SU-8 Photoresist Discussion Forum
Date: 2004, Jun 10
From: Annuar <aaehsan@eng.ukm.my>

Hi everyone. I'm having problem coating my glass slide with SU-8 resist. It seems that the SU-8 does not adhere very well to glass. After developing, some part of my patterns are lifted off. Does anyone know how to solve this problem? Does the softbake or PEB have anything to do with this? Thanks. Abang Annuar

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1. Glass / SU-8 adhesion by Jim, 2004, Jul 01

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