[
Next-in-Thread ]
[
Next Message ]
Tapered SU-8 structures
-
Forum:
SU-8 Photoresist Discussion Forum
Re:
Question:
Taper SU-8 structure (Annuar)
Date: 2004, Jun 22
From: Brian
|
It is possible to create tapered structures with SU-8 using grey scale lithography. Prof. Martin Afromowitz at the Univ. of Washington has done work in this area. I am not sure if he has published any papers on the topic, though. Maybe someone else has some info on any papers published in this area.
Good Luck,
Brian
|
[
Next-in-Thread ]
[
Next Message ]
Messages
Inline:
[
1 ]
[
All ]
Outline:
[
1 ]
[
2 ]
[
3 ]
[
Add Message ]
to: "Tapered SU-8 structures"
[
Register ]
[
Subscribe ]
[
Admin Mode ]
[
Show Frames ]
[
Search ]
[
Help for Discussion Forum 1.10EW ]