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Pyramid structure by e-beam lithography 

Forum: SU-8 Photoresist Discussion Forum
Date: 2004, Sep 16
From: <yangx349@umn.edu>

Hi,

I try to make pyramids out of SU-8 by e-beam lithography. Anybody know anything (link, research, paper, dissertation, whatever)?

best, Yang.

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1. Untitled by Michelle, 2005, Sep 09

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