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Forum: SU-8 Photoresist Discussion Forum
Re: Pyramid structure by e-beam lithography
Date: 2005, Sep 09
From: Michelle <mkovarik@indiana.edu>

Hi, It's been a while since you posted this, so perhaps you have found something by now, but I thought you might be interested in these articles if you haven't found them yet: Radhakrishnan et al. Microelectronic engineering, 67-68, 2003, 306-311 and Wong and Pun, Advances in resist technology and processing, 26-28, 2001, Proceedings of SPIE, 873-880. Michelle

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