Sporian Microsystems | MEMS Packaging Forum
 Sporian Microsystems: Products




Sporian Microsystems: Services



Forum
[ Next-in-Thread ]  [ Next Message ] 

Question: Minimum Feature Size 

Forum: SU-8 Photoresist Discussion Forum
Date: 2004, Nov 12
From: Bhargav Bhargav

Hey can any one suggest a method/recipe to get a feature size of 200 nm using contact lithography and SU-8 photoresisit on Silicon.

[ Next-in-Thread ]  [ Next Message ] 

Messages Inline: [ 1 ]  [ All ]  Outline: [ 1 ]  [ 2 ]  [ 3 ] 

[ Add Message ]  to: "Minimum Feature Size"

[ Register ]  [ Subscribe ]  [ Admin Mode ] 
[ Show Frames ]  [ Search ]  [ Help for Discussion Forum 1.10 ] 

Terms of Use | Privacy Policy | Site Map | Related MEMS Links | Search this Site

Copyright Sporian Microsystems