Question: i-line filters for elimination of 'T-topping' problem? 

Forum: SU-8 Photoresist Discussion Forum
Date: 2001, Dec 03
From: Novak Farrington <eennf@leeds.ac.uk>

Hi there, I have been using various formulations of SU-8 which has been made in house (although commercial mixes have also been used). Unfortunately our structures have been suffering from an exaggerated negative sloping sidewall problem commonly referred to as 'T-topping'. The latest base processing guidelines on the MCC website blame this problem on the 313nm and 334nm output lines of mercury vapour lamps and suggest that the problem can be eliminated by optimising the spectral bandwidth (ie using an i-line filter). I was just wondering if anyone had taken this step and solved the problem. Thanks in advance, Novak Farrington

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2. Idea:T-topping and PEB, 2005, Jul 06

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