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SU-8 is a thick, near-UV photoresist used for MEMS fabrication. This forum is for discussing SU-8 research, development, applications, suppliers, coating, processing, removal, economics, benefits, drawbacks, and other issues related to SU-8.

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Messages Inline: 1 All Outline: 1 2 3

1. Question Suppliers of SU-8? by Brian, 2001, Oct 04
2. Feedback Tech Support by Kev, 2001, Oct 10
4. News SU-8 Providers by SU8man, 2006, May 09
3. Note SU-8 information resource. by Brian, 2001, Oct 05
1. None Untitled by Wenge Zhang, 2001, Oct 05
5. Question where can i find su-8 sold in China? by wujin, 2004, Apr 27
5. More SU8 website changed address! by aveclafaux, 2006, Aug 25
4. Question SU-8 as a master for hot embossing by Emer, 2001, Oct 18
1. Feedback SU-8 Microembossing by Richard Gray, 2001, Nov 08
5. Question Utilisation of Su-8 for optical components by Yves, 2001, Nov 02
6. Question i-line filters for elimination of 'T-topping' problem? by Novak Farrington, 2001, Dec 03
2. Idea T-topping and PEB, 2005, Jul 06
7. None SU-8 seems to be a good thermal insulator by Bing, 2001, Dec 17
8. Question Research Assistant by sarang, 2002, Jan 24
1. Note Hai sarang by rpshk@yahoo.com, 2005, Aug 01
9. Question adhesion SU-8 by oliver, 2002, Jan 30
1. News SU-8 Adhesion by MarkShaw, 2002, Feb 04
10. None SU8 -Removal by sarang, 2002, Feb 12
1. Feedback Untitled by Sarah, 2002, Feb 23
2. News SU8-Removal by Tepla, 2002, May 05
1. Question More details on the Tepla approach, please. by Brian, 2002, May 06
1. Feedback TePla Work to Date. More information is available. by Hank Gilbert, 2003, Mar 26
2. Warning SU8 - TePla America, Inc. by Karsten Mausolf, 2002, Oct 04
3. Question Message for Sarang by Chinmay, 2004, Jan 09
5. None SU-8 removal by Satyanarayan, 2007, Apr 03
6. Idea removing su8 by LuisEnrique, 2008, Feb 11
11. Question SU-8 compatibility with DMSO by Desmo, 2002, Jun 07
1. Question SU8 Bonding Problem by sarang, 2002, Jul 15
12. Question SU-8 uniformity problem after coating by holiday_2001sg@yahoo.com.sg, 2002, Sep 30
13. Note SU-8 as e-beam resist by Tiberiu, 2002, Oct 09
14. Question Crosslinked SU8 removal by kssgin@yahoo.com, 2002, Dec 17
2. Question skew surface and bur edge by wzhang@uci.edu, 2003, Dec 20
16. Question SU-8 biocompatibility and medical applications by Yoel, 2002, Dec 18
3. None not really by Shmuel, 2006, Mar 11
17. None Su8 thickness uniformity across the wafer by Fran Blanco, 2003, Feb 17
18. Question SU8 and fluorescence by Patrick Abgrall, 2003, Mar 11
1. None About Su8 and Fluorescence by Fran, 2003, Mar 20
2. None Research Associate by Eric Hullander, 2005, Sep 26
19. Question Flatness of SU8 during Softbake by wei_lim, 2003, Mar 20
1. Ok Untitled, 2003, Mar 20
20. Question Bonding with SU8 by J, 2003, May 09
1. None Research Associate by Eric Hullander, 2005, Sep 26
21. None SU-8 biocompatibility by research student, 2003, Jun 13
22. Question Untitled by huinanliang, 2003, Jun 17
1. Question su8 bonding problem by huinanliang, 2003, Jun 17
23. None Untitled by dte002, 2003, Jul 05
24. None SU8 bonding with SU8 by Calvin, 2003, Sep 07
25. Question Applying SU8 to Thermoplastics by colin, 2003, Sep 29
26. Question Planarization of SU8 using CMP by Peter Blennow, 2003, Nov 14
27. Question Thin film deposition onto SU-8 - adhesion problems by michael, 2003, Dec 27
28. Question want sharper corners by rollcasterschek, 2004, Jan 14
1. Question Reg: want sharper corners by kapes, 2004, Jun 09
29. Idea SU-8 bonded to nanofibers by george, 2004, Mar 10
30. Question Thickness Control by Weed, 2004, Mar 11
1. None Leveled hotplate? by Rainod, 2004, Mar 31
(_ Agree Hotplate leveling is important. by Brian, 2004, Jun 22
31. Question An appeal for help from a beginner (but a happy one) by Jim, 2004, May 04
32. More we are keen to know about products of Sotec and equivalent to SU8 by rpsoni, 2004, May 07
33. Question SU-8 adhesion to glass substrate by Annuar, 2004, Jun 10
1. None Glass / SU-8 adhesion by Jim, 2004, Jul 01
34. Question SU8 density ? by Nico, 2004, Jun 16
35. Question Taper SU-8 structure by Annuar, 2004, Jun 20
1. None Tapered SU-8 structures by Brian, 2004, Jun 22
3. None Untitled by Ryan Turner, 2004, Jul 08
36. Question SU-8 development problems by leonid, 2004, Jun 28
37. None Multi-layered SU-8 (optimised?) by Jim, 2004, Jul 06
38. Question Behaviour of SU-8 at high temperatures by Sandeep, 2004, Jul 08
39. None Untitled by siriponsukuabol, 2004, Aug 13
40. Question conductive SU8 by johan feenstra, 2004, Aug 20
1. None Conductive and magnetic SU8 by Thorsten, 2005, Mar 12
42. Question Adhesion force by Mike, 2004, Sep 07
43. Question Unwanted tapering of SU-8 structure by sus, 2004, Sep 08
3. Question swelling of SU-8 in electroforming solution by zzliedu, 2006, Jun 27
44. Question Width Control by Gene, 2004, Sep 15
45. None Pyramid structure by e-beam lithography by yangx349@umn.edu, 2004, Sep 16
1. None Untitled by Michelle, 2005, Sep 09
46. Question Problems with the alignment by Leire, 2004, Sep 28
47. Question Bad profile of SU-8-2050 by sklee, 2004, Oct 06
50. Question SU-8 on sacrificial wafer by Steve, 2004, Oct 19
51. News SU-8 Stripping with MW plasma by Karsten Mausolf, Senior Process Engineer, 2004, Oct 25
52. Question Minimum Feature Size by Bhargav, 2004, Nov 12
53. Question Swelling of the SU-8 during exposure by Carson, 2004, Dec 02
54. Question Su-8 adhesion to Si wafers.... by Neal, 2004, Dec 07
1. None a couple of tips by sandra wilson, 2005, Jun 27
5. Feedback Untitled by Satyanarayan, 2007, May 21
55. Question SU-8 for planarization by Arvin, 2004, Dec 16
56. Question strange problem while working with SU-8 50 by Amit Asthana, 2005, Apr 12
2. Question over exposed? by Tim, 2005, Dec 14
3. None Untitled, 2006, Feb 06
57. Question Water permeability by Chung-Yen Chao, 2005, May 25
59. Question su 8 and high vacuum by david, 2005, Jul 06
60. Question protection of the SU 8 , 2005, Jul 13
1. None re-"protection of the SU 8" by SU8man, 2005, Jul 13
(_ None Untitled, 2005, Jul 26
(_ None Untitled by SU8man, 2005, Aug 17
(_ Feedback Untitled, 2006, May 09
61. None Cleaning Microfluidic Devices (SU8-2000 on Glass) by Avinash Kane, 2005, Jul 14
1. None Untitled by SU8man, 2005, Aug 17
62. Question Obsorbtion coefficient of SU 8 Blends.. by Riyaz Pasha Shaik, 2005, Aug 01
1. None Untitled by SU8man, 2005, Aug 17
2. None Untitled by sr, 2005, Aug 24
3. Feedback Thanks by Riyaz, 2005, Aug 29
63. Question SU 8 Reflow? by Shaik, Riyaz Pasha, 2005, Sep 16
64. Question Dicing through SU-8 by Jason, 2005, Oct 11
65. Question Thinning SU-8 2002 by Mark, 2005, Oct 31
68. Question Alignment Question for 2-step photolithography using SU-8 by Razim, 2006, Feb 23
1. Idea Aligning, 2006, Mar 14
2. Ok Thanks! by razim, 2006, Mar 15
70. Question SU8 stiction problem by praba.selva@gmail.com, 2006, Apr 05
1. Feedback Untitled by PJ, 2006, Apr 20
71. Question SU8 photo resist with filler particles by Benjamin, 2006, Apr 24
2. None filler SU-8 by SU8man, 2007, Apr 25
72. Question Thicker SU 8 spin problems by Pedro, 2006, May 03
73. Question SU-8 problems by Kelkar, 2006, May 23
1. None Satya by Satyanarayan, 2007, Apr 03
74. Question Fabs or foundries that can do double layer SU8? by Wouter Meuleman, 2006, Jun 07
75. Question mold release layer for SU-8 by Abang Annuar, 2006, Jun 26
76. None Mechanical Engineer by Matthew Shiu, 2006, Aug 08
79. Question Using SU-8 with S1813 by EdCarr101, 2006, Nov 27
80. Question Thickness problem and divots after SU-8 spin coating by simalibre, 2006, Dec 13
1. Idea Eliminando burbujas en la pelicula de SU8 by LuisEnrique, 2008, Feb 11
81. Question Undeveloped SU-8 light sensitivity - ok for use under 'normal' lighting? by kh, 2007, Jan 03
82. News Thick Photoresist/Litho Career Opportunity in Los Angeles by nickm@wdsearch.com, 2007, Feb 20
83. News Revised Los Angeles Photolithography Process Engineer Search by nickm@wdsearch.com, 2007, Feb 21
84. Question Conductive or Colored SU-8 by dalnim, 2007, Apr 08
1. None Untitled by SU8man, 2007, Apr 25
85. Question Thin layers by fsteve, 2007, May 11
86. Question Untitled by tigon327, 2007, May 20
1. None SU-8 Solvent by Neios, 2007, Oct 15
87. None Image Reversal? by Yitram, 2007, Jun 12
88. None SU-8 thickness by tresvpl, 2007, Jun 19
89. Question PMMA/COC vs. Su8 Compatibility by iman, 2007, Sep 10
90. None memsconcepts.com by sharone, 2007, Oct 28
91. Question Photomask Cleaning by terrymcb, 2007, Nov 02
92. Question SU-8 removal by Solmaz, 2008, Mar 12

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