SU8-Removal 

Forum: SU-8 Photoresist Discussion Forum
Re: SU8 -Removal (sarang)
Date: 2002, May 05
From: Tepla

We have developed a method to very easily and effectively remove SU8 using the Tepla Microwave Plasma batch asher. I think this will be very useful to many MEMS companies.

Messages Inline: Outline:

1. More details on the Tepla approach, please. by Brian, 2002, May 06

1. TePla Work to Date. More information is available. by Hank Gilbert, 2003, Mar 26

2. SU8 - TePla America, Inc. by Karsten Mausolf, 2002, Oct 04

to: "SU8-Removal"