SU-8 removal

Forum: SU-8 Photoresist Discussion Forum
Re:

SU8 -Removal (sarang)
Date: 2007, Apr 03
From: Satyanarayan

Hi, I found piranha etch removes UV exposed SU-8 pretty well. We have been cleaning our wafers with cured SU-8 with piranha etch. Do try it and let me know !

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