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I got problem in uniformity of layer after the coating. The liquid will form shell after the dispensing, therefore it acts as a barrier. This will result in non uniform layer with thick region around the outer boundary of the shell. Is there anyone know how to solve this problem? Actually I have tried to leave it for 1-2 hours before Soft Bake, at room temperature and also at 50 degrees C. Thanks. Best Regards. |
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SU-8 uniformity problem after coating