SU-8 as e-beam resist 

Forum: SU-8 Photoresist Discussion Forum
Date: 2002, Oct 09
From: Tiberiu <txf23@cwru.edu>

Hi Does somebody used SU-8 2 or 2000 as e-beam resist.We have a problem of exposure and development I think. If somebody has a recipe I'll appreciate. Regards Tiberiu

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