skew surface and bur edge 

Forum: SU-8 Photoresist Discussion Forum
Re: Crosslinked SU8 removal
Date: 2003, Dec 20
From: <wzhang@uci.edu>

Hi, I have following problems: Some of my SU8 layers have skew top surface after photolithography process. What caused it? At edge of patterned lines, there are many burs. What caused it? Thanks for your advice!

Messages Inline: Outline:

to: "skew surface and bur edge"