Su8 thickness uniformity across the wafer 

Forum: SU-8 Photoresist Discussion Forum
Date: 2003, Feb 17
From: Fran Blanco Fran

Dear all, I am Fran Blanco from Ikerlan Microsystems. Do you know which are the usual values of thickness uniformity across the wafer for Su8 50 (Si substrate) whith the Standard recipe of Microchem ? In our cleanromm I have obtained that the variation in thickness over a wafer is can easily over 18%! not quite good for some of our micromachinig applications. Thanks in advance, Fran.

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