su8 bonding problem 

Forum: SU-8 Photoresist Discussion Forum
Re: Untitled
Date: 2003, Jun 17
From: huinanliang

Hi all, I have a question about the omnicoat for the su8. I use glass slide as my substrate. If I want to use omnicoat, need I spin a layer of HMDS before I spin the omnicoat. Another question is are there some persons who have experience in the su8 bonding. I fabricate channel with su8-50, and then spin su8-2 on another glass slide and then bond the two slides. But I failed several times, doesn't anybody can give me some advice. Thank you very much! huinan

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