SU8 bonding with SU8

Forum: SU-8 Photoresist Discussion Forum
Date: 2003, Sep 07
From: Calvin <g913748@oz.nthu.edu.tw>

Hi, as title, is there any method to bond two SU8 layers? I was told to stain SU8 between two layers and then exposure. Is there any problem may occur? P.S The min line-width is 15~20um on one SU8 layer, and the other SU8 layer has no pattern (flat). Thanks a lot. Calvin Chen g913748@oz.nthu.edu.tw Control Division Power Mechanical Engineering Departament Tsing-Hua University Taiwan

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