Planarization of SU8 using CMP 

Forum: SU-8 Photoresist Discussion Forum
Date: 2003, Nov 14
From: Peter Blennow <pebletu@hotmail.com>

Hi everyone, Does anyone have any experience or suggestions on how to planarize a thin film of SU8? I am working in a project where we try to planarize and decrease the height of a cured SU8 film. The initial thickness is about 0.005 mm. The final thickness should be 0.003 mm. I would be grateful for any suggestions. /Peter Blennow

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