Tapered SU-8 structures 

Forum: SU-8 Photoresist Discussion Forum
Re: Taper SU-8 structure (Annuar)
Date: 2004, Jun 22
From: Brian

It is possible to create tapered structures with SU-8 using grey scale lithography. Prof. Martin Afromowitz at the Univ. of Washington has done work in this area. I am not sure if he has published any papers on the topic, though. Maybe someone else has some info on any papers published in this area. Good Luck, Brian

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