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Forum: SU-8 Photoresist Discussion Forum
Re: Question Taper SU-8 structure (Annuar)
Date: 2004, Jul 08
From: Ryan Turner <turner@mezzotech.biz>

Here is a paper I wrote on the subject.

http://ej.iop.org/links/q05/n7pQsOINJJvu+mpCUQLLkg/jm3303.pdf

I can answer any questions at turner@mezzotech.biz

Hope this helps

Ryan

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