Unwanted tapering of SU-8 structure 

Forum: SU-8 Photoresist Discussion Forum
Date: 2004, Sep 08
From: sus <suscarl@singnet.com.sg>

Need advice from SU-8 experts: I have 30um width by 55um height SU-8 2035 lines. Somehow, after 35s exposure time and post-bake of 95oC for 20min, the resulting structures are tapered with bottom 60um width and top 40um width. Can anyone offer possible solutions to troubleshoot the problem? Thanks!!

Messages Inline: Outline:

3. swelling of SU-8 in electroforming solution by zzliedu, 2006, Jun 27

to: "Unwanted tapering of SU-8 structure"