Problems with the alignment

Forum: SU-8 Photoresist Discussion Forum
Date: 2004, Sep 28
From: Leire <lbilbao@inasmet.es>

Hi,
I am trying to alignment two layer of SU-8, but I can´t because It imposible to see the drawing of the first layer by the microscopie of mask-aligment, does somebody know wath is the problem? Is a problem with the crosslink of the first layer? or is a problem with the transparency of the second layer? I notice that if I coat the wafer with the second layer and wait about one month, the alignment is easier. What can I do? Thanks,

Select this message: Problems with the alignment

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