I am using the SU-8 2035 for making film thicknesses of 50 microns.
I am proceeding with the soft and hard bake in a normal way. After my exposure I can see clearly that around the structure I have considerable swelling of my polymer, around 100% of my original thickness. SOmetimes the polymer sticks well, sometimes it delaminates from its region
Also, the structure I expose is somewhat always minored in dimensions in comparison of my original mask.
Has someone ever encountered this problem?
Is it due to a wrong exposure time (I am using a UV source , 365 nm), 7 to 9 seconds?
Is it due to a bad curing? maybe should be longer to reduce stress?
Many thanks for your help