Swelling of the SU-8 during exposure 

Forum: SU-8 Photoresist Discussion Forum
Date: 2004, Dec 02
From: Carson <svetleis@yahoo.fr>

Hello All, I am using the SU-8 2035 for making film thicknesses of 50 microns. I am proceeding with the soft and hard bake in a normal way. After my exposure I can see clearly that around the structure I have considerable swelling of my polymer, around 100% of my original thickness. SOmetimes the polymer sticks well, sometimes it delaminates from its region Also, the structure I expose is somewhat always minored in dimensions in comparison of my original mask. Has someone ever encountered this problem? Is it due to a wrong exposure time (I am using a UV source , 365 nm), 7 to 9 seconds? Is it due to a bad curing? maybe should be longer to reduce stress? Many thanks for your help CArson

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