a couple of tips 

Forum: SU-8 Photoresist Discussion Forum
Re: Su-8 adhesion to Si wafers.... (Neal)
Date: 2005, Jun 27
From: sandra wilson <sswwilson@hotmail.com>

Hi there, You have a relatively thick film of SU8, 300mJ is a low dose for 40 microns, you might want to try a slightly higher dose, or a longer bake out time. HMDS seems to work as a anti-stick film for SU8, so I would recommend leaving that alone. What probably is worth taking a look at is the surface material where onto which you are depositing the SU-8. Gold and platinum are difficult for SU8 to coat to, a trick there is to leave the substrate to cool on a hotplate before removing. Sandra

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