SU-8 for planarization 

Forum: SU-8 Photoresist Discussion Forum
Date: 2004, Dec 16
From: Arvin sirarvin

I had heard that SU-8 is not easily removed by aceton. Thats why i tried to use it for planarization after i had glued a small crystal to a substrate. i want to have a smooth slope from the substrate to the top of crystall. I used SU-8 2035 (have also tried SU-8 2002). after soft baking, exposure and then PEB and then hardbaking i exactly can have the smooth slope and clean surface which i want but the problem is that in spite of what i beleived SU-8 is removed very fast when i immerse my sample into Aceton! I want it to become extemely unremovable by aceton. Does anybody know what can be the problem and what should i do?

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