protection of the SU 8 

Forum: SU-8 Photoresist Discussion Forum
Date: 2005, Jul 13
From: <Anonymous>

Hi, I am working with the SU8 and I found some problems, could someone help me,my process ia as follows,I desposit a 50 micron layer of SU8, then I expose part of it through a mask, later I deposit Aluminum all over the SU8, and later I remove the Aluminum that is over the non exposure SU8, and finally I try to develop the non exposured SU8 so this way to have pillars of SU8 and on the top of them a Aluminum layer, but it does not work because we think when we deposit the aluminum, some energy is given to the non exposured part of the SU8, and it cross linked and behaves as it also had been exposured. Could someone give me some help? Thanks. Victor

Messages Inline: Outline:

1. re-"protection of the SU 8" by SU8man, 2005, Jul 13

(_ Untitled, 2005, Jul 26

(_ Untitled by SU8man, 2005, Aug 17

(_ Untitled, 2006, May 09

to: "protection of the SU 8"