Cleaning Microfluidic Devices (SU8-2000 on Glass)

Forum: SU-8 Photoresist Discussion Forum
Date: 2005, Jul 14
From: Avinash Kane Avinash

Hello,
I am currently fabricating microfluidic devices in SU8-2000. I am interested in knowing how other users are cleaning their devices after fabrication. This will help to prevent clogging when reagents are pumped through the devices.
My device substrate is glass. I am not currently hardbaking my wafers. I'm wondering if there are chemicals that can aggressively clean my wafers without harming my SU8 patterns.
Thanks very much,
Avinash Kane

Select this message: Cleaning Microfluidic Devices (SU8-2000 on Glass)

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1. Untitled by SU8man, 2005, Aug 17

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