Cleaning Microfluidic Devices (SU8-2000 on Glass) 

Forum: SU-8 Photoresist Discussion Forum
Date: 2005, Jul 14
From: Avinash Kane Avinash

Hello, I am currently fabricating microfluidic devices in SU8-2000. I am interested in knowing how other users are cleaning their devices after fabrication. This will help to prevent clogging when reagents are pumped through the devices. My device substrate is glass. I am not currently hardbaking my wafers. I'm wondering if there are chemicals that can aggressively clean my wafers without harming my SU8 patterns. Thanks very much, Avinash Kane

Messages Inline:

Untitled Re: Cleaning Microfluidic Devices (SU8-2000 on Glass) (Avinash Kane) Date: 2005, Aug 17 From: SU8man

Hi, If your microchannels are opened: - rince with a new bath of developper - if it is not enough, make an oxygen plasma a few seconds (10-30) at 500W and repeat if it is not clear. Seb.

to: "Cleaning Microfluidic Devices (SU8-2000 on Glass)"