Sporian Microsystems | MEMS Packaging Forum
 Sporian Microsystems: Products




Sporian Microsystems: Services



 Forum
Next-in-Thread Next Message

None Cleaning Microfluidic Devices (SU8-2000 on Glass) 

Forum: SU-8 Photoresist Discussion Forum
Date: 2005, Jul 14
From: Avinash Kane Avinash

Hello,

I am currently fabricating microfluidic devices in SU8-2000. I am interested in knowing how other users are cleaning their devices after fabrication. This will help to prevent clogging when reagents are pumped through the devices.

My device substrate is glass. I am not currently hardbaking my wafers. I'm wondering if there are chemicals that can aggressively clean my wafers without harming my SU8 patterns.

Thanks very much,

Avinash Kane

Next-in-Thread Next Message

Messages Inline: 1 All Outline: 1 3 All

1. None Untitled by SU8man, 2005, Aug 17

Add Message to: "Cleaning Microfluidic Devices (SU8-2000 on Glass)"

Register Subscribe Admin Mode Show Frames Search Help for Discussion Forum 1.10

Terms of Use | Privacy Policy | Site Map | Related MEMS Links | Search this Site
Copyright Sporian Microsystems