Thinning SU-8 2002 

Forum: SU-8 Photoresist Discussion Forum
Date: 2005, Oct 31
From: Mark <Mark.E.Curtis-1@ou.edu>

Hello all, I am wondering if anyone has any expertise in thinning SU-8 2002. I have recently purchased both the SU-8 2000 series thinner and SU-8 2002. What I would like to do is thin the SU-8 2002 to 100 nm or below, but I don't know if that is even possible. If anyone has attempted this or knows roughly of how thin I can go, I would greatly appreciate hearing your advice. Thanks.

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