SU8 stiction problem 

Forum: SU-8 Photoresist Discussion Forum
Date: 2006, Apr 05
From: <praba.selva@gmail.com>

Hi, Does anyone know how to overcome SU8 stiction problem when you do the alignment? Basically, I need to align my mask with the wafer that has SU8 on it. Because of the stiction problem, wafer sticts to the maske and can not do any alignment at all. Please let me know asap how to over come this problem. Thank you. ps

Messages Inline: Outline:

1. Untitled by PJ, 2006, Apr 20

to: "SU8 stiction problem"