Thickness problem and divots after SU-8 spin coating 

Forum: SU-8 Photoresist Discussion Forum
Date: 2006, Dec 13
From: simalibre

Hi All, We spent much time in order to test the SU-8 2050 to obtain the wanted thickness (near 120 microns). We levelled very well our hot plate and we tested different times, temperatures and exposure times. The major problem occurs after spin coating process. After spinning, there are no (or very few) bubbles but we observed non uniform layer and non smooth surface with streaks. When we perform the soft bake SU-8 film tends to "spontaneously" form a number of divots or craters that are not initially present (after spin-coating). These problems are observed with or without the use of OMNICOAT both on silicon surface and Cu seed-layer also at different spin velocities. Has anyone experienced this problem? thanks Simone Marasso Dipartimento di Fisica - Politecnico di Torino Laboratorio Materiali e Microsistemi (Chivasso - Torino)

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1. Eliminando burbujas en la pelicula de SU8 by LuisEnrique, 2008, Feb 11

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