SU-8 removal 

Forum: SU-8 Photoresist Discussion Forum
Date: 2008, Mar 12
From: Solmaz

Hi, I was wondering what the best method is for removing SU-8 photoresist that has not been hardbaked. I'm finding it very difficult to remove SU-8 by plasma ashing and was wondering if anyone has tried Microchem's Nano Remover PG (which I'm considering buying). Are there alternatives to this? I know piranha etching has been mentioned - is it acid or base piranha and is it not dangerous to put SU-8 photoresist together with piranha etch (i.e. explosive!)? Would be very grateful for any suggestions. Solmaz

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