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SU-8 is a photo-imagable epoxy based on EPON epoxy
resin (from Shell Chemical) that was originally developed, and patented by
IBM. This astounding epoxy photo-resist can be deposited in very thick
layers and developed with very high aspect ratio (>20) features using
standard photolithography equipment. While Sporian does not sell this
material, we do have extensive experience in its use and can provide
consultation and fabrication services. Two companies that do sell Su-8 are
MicroChem
Inc. and
Gerstel SA.
Visit our
SU-8 Forum for a full discussion of SU-8
issues. |
